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Helium Ion Microscopy - ARMIN GÖLZHÄUSER - GREGOR HLAWACEK

Helium Ion Microscopy

Publisher title : Helium Ion Microscopy

ARMIN GÖLZHÄUSER
GREGOR HLAWACEK

 
$234.02
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This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are discussed in an extra section. The structure of the book allows the novice to get acquainted with the specifics of the technique needed to understand the more applied chapters in the second half of the volume. The expert reader will find a complete reference of the technique covering all important applications in several chapters written by the leading experts in the field. This includes imaging of biological samples, resist and precursor based nanofabrication, applications in semiconductor industry, using Helium as well as Neon and many more. The fundamental part allows the regular HIM user to deepen his understanding of the method. A final chapter by Bill Ward, one of the pioneers of HIM, covering the historical developments leading to the existing tool complements the content.

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Price: $234.02
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Author:  ARMIN GÖLZHÄUSER
GREGOR HLAWACEK
Title: Helium Ion Microscopy
Release date: October 2016
Editor: LIVRES NUMÉRIQUES DIVERS
Subject: NUL DIVERS
ISBN: 9783319419909 (33194199011)
Renaud-Bray Reference: 2180763
Item nb: 2180763
Digital rights
Format: PDF
Availability : Canada, other authorized countries.
Digital Rights Management : Adobe DRM
Numeric warehouse : NUMILOG
Number of authorized devices: 3
Number of copy-and-pastes: 0
Print: 0

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